Handbook of microlithography, micromachining and microfabrication Vol. 2, Micromachining and microfabrication
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| SPIE Optical Engineering Press, IEE - The Institution of Electrical Engineers | cop. 1997 | Storbritannien, Bellingham, Wash, London | viii, 692 sidor. ill. | |
| SPIE Press, Institution of Electrical Engineers (IEE | 1997 | USA, Bellingham, Stevenage | online reource (viii, 692 sidor.) ill. | 978-0-8194-2379-5 |